Description: Nanofabrication Please note: this item is printed on demand and will take extra time before it can be dispatched to you (up to 20 working days). Techniques and Principles Author(s): Maria Stepanova, Steven Dew Format: Paperback Publisher: Springer Verlag GmbH, Austria Imprint: Springer Verlag GmbH ISBN-13: 9783709116661, 978-3709116661 Synopsis Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
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Location: Aldershot
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Book Title: Nanofabrication
Number of Pages: 344 Pages
Publication Name: Nanofabrication: Techniques and Principles
Language: English
Publisher: Springer Gmbh
Item Height: 235 mm
Subject: Engineering & Technology, Physics
Publication Year: 2014
Type: Textbook
Item Weight: 539 g
Subject Area: Nanotechnology
Author: Maria Stepanova, Steven Dew
Item Width: 155 mm
Format: Paperback