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MKS ASTEX ASTRON 2L Remote plasma source AX7651
MKS ASTEX ASTRON 2L Remote plasma source AX7651

$15000.00

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MKS Instruments FI20166 SmartMatch ASTeX AMAT 0190-49840 Working Surplus
MKS Instruments FI20166 SmartMatch ASTeX AMAT 0190-49840 Working Surplus

$6008.24

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MKS R*EVOLUTION III AX7695 ASTEX REMOTE PLASMA SOURCE ASSY
MKS R*EVOLUTION III AX7695 ASTEX REMOTE PLASMA SOURCE ASSY

$34079.93

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MKS AsTex FI20110 SmartPower 6.0kW Generator, Inverter 2.7C Upgraded
MKS AsTex FI20110 SmartPower 6.0kW Generator, Inverter 2.7C Upgraded

$2999.97

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MKS ASTeX ASTRON 2L FI20620-1 REMOTE PLASMA SOURCE RPS GENERATOR AMAT 0920-00013
MKS ASTeX ASTRON 2L FI20620-1 REMOTE PLASMA SOURCE RPS GENERATOR AMAT 0920-00013

$8999.00

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MKS AsTex FI20111 6.0kW Mag. Head Magnetron RF Generator WR284 Waveguide Output
MKS AsTex FI20111 6.0kW Mag. Head Magnetron RF Generator WR284 Waveguide Output

$2699.97

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MKS ASTeX PrecisionPower Detector FI20165 Microwave Plasma Products
MKS ASTeX PrecisionPower Detector FI20165 Microwave Plasma Products

$266.43

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MKS R*EVOLUTION III AX7695 ASTEX REMOTE PLASMA SOURCE ASSEMBLY
MKS R*EVOLUTION III AX7695 ASTEX REMOTE PLASMA SOURCE ASSEMBLY

$34080.00

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PC86411 SA86411 MKS/ASTEX
PC86411 SA86411 MKS/ASTEX

$1999.00

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MKS smartpower magnetron power supply 6kw FI20110 downstream plasma AMAT astex
MKS smartpower magnetron power supply 6kw FI20110 downstream plasma AMAT astex

$2900.00

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MKS Instruments Astex ARX-X491 Rev. F
MKS Instruments Astex ARX-X491 Rev. F

$408.24

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MKS ASTex AMAT Ozone Generator Delivery System AX8300QTI-902077 AX8300A
MKS ASTex AMAT Ozone Generator Delivery System AX8300QTI-902077 AX8300A

$11399.40

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MKS ASTEX TRANSFORMERS - m/n LCX X225 REV 01 SNC P22076
MKS ASTEX TRANSFORMERS - m/n LCX X225 REV 01 SNC P22076

$139.99

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MDC MFG INC Valve Flange Nipple MKS Astex Fluke
MDC MFG INC Valve Flange Nipple MKS Astex Fluke

$459.00

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MKS ASTEX Parts Used SA86244 Rev.B PCB-I-E-1542=6BX4
MKS ASTEX Parts Used SA86244 Rev.B PCB-I-E-1542=6BX4

$399.90

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MKS ASTEX Used SA86241 Rev.G 1218 SA86237 Rev.E 3519 PCB-I-E-1540=6FX1
MKS ASTEX Used SA86241 Rev.G 1218 SA86237 Rev.E 3519 PCB-I-E-1540=6FX1

$499.90

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MKS ASTeX FI20162-1 3.0kW Mag Head
MKS ASTeX FI20162-1 3.0kW Mag Head

$5000.00

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MKS ASTEX Revolution Integrated Rmote Plasma Source AX7690PSK-04 (As-Is)
MKS ASTEX Revolution Integrated Rmote Plasma Source AX7690PSK-04 (As-Is)

$8857.00

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ASTeX Applied Science & Technology GL341CPR Microwave RF Waveguide MKS Working
ASTeX Applied Science & Technology GL341CPR Microwave RF Waveguide MKS Working

$1008.23

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MKS AsTeX AX7645RH-10 Astron hf-s Reactive Gas Plasma Generator Head Only AX7645
MKS AsTeX AX7645RH-10 Astron hf-s Reactive Gas Plasma Generator Head Only AX7645

$12491.29

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NEW NPP remote plasma source 15 slpm comparable mks astex astron hf-s fluorine
NEW NPP remote plasma source 15 slpm comparable mks astex astron hf-s fluorine

$5000.00

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MKS ASTEX SA86244-01 Circuit Board Rev.E 45163⭐NEW⭐
MKS ASTEX SA86244-01 Circuit Board Rev.E 45163⭐NEW⭐

$399.00

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FI20111 MKS/ASTEX 6.0K W MAG. HEAD
FI20111 MKS/ASTEX 6.0K W MAG. HEAD

$3900.00

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ASTeX Applied Science & Technology AX3151 3.0kW Circulator MKS Working Surplus
ASTeX Applied Science & Technology AX3151 3.0kW Circulator MKS Working Surplus

$3508.23

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ASTRON e/ex MKS Instruments AX7685-33 RPS Plasma Source ASTeX Tested Working
ASTRON e/ex MKS Instruments AX7685-33 RPS Plasma Source ASTeX Tested Working

$22012.24

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MKS Instruments FI20164 Precision Power Detector Module ASTeX Working Surplus
MKS Instruments FI20164 Precision Power Detector Module ASTeX Working Surplus

$1504.24

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MKS ASTEX AX3076 SMART MATCH
MKS ASTEX AX3076 SMART MATCH

$8000.00

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31322 MKS ASTEX R*EVOLUTION REMOTE PLASMA SOURCE AX7690LAM-23
31322 MKS ASTEX R*EVOLUTION REMOTE PLASMA SOURCE AX7690LAM-23

$30000.00

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MKS F120166 ASTEX SMART MATCH AMAT APPLIED MATERIALS 0190-49840
MKS F120166 ASTEX SMART MATCH AMAT APPLIED MATERIALS 0190-49840

$10000.00

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RF Filter Box Radio Frequency -Heater In/Out - MKS Instruments? Astex? G06 2159
RF Filter Box Radio Frequency -Heater In/Out - MKS Instruments? Astex? G06 2159

$99.99

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MKS ASTEX PRODUCTS F120160-3 RF GENERATOR 3.0kW 208V 3PH
MKS ASTEX PRODUCTS F120160-3 RF GENERATOR 3.0kW 208V 3PH

$6000.00

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ASTEX MKS ARX-X491 MICROWAVE CONTROL MODULE AMAT 0190-00398, 200/208VAC, (DL65)
ASTEX MKS ARX-X491 MICROWAVE CONTROL MODULE AMAT 0190-00398, 200/208VAC, (DL65)

$1050.00

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ASTRON e/ex MKS Instruments AX7685-36 RPS Plasma Source ASTeX Tested Working
ASTRON e/ex MKS Instruments AX7685-36 RPS Plasma Source ASTeX Tested Working

$22012.24

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MKS ASTeX FI20162-1 3.0kW Mag Head
MKS ASTeX FI20162-1 3.0kW Mag Head

$5900.00

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C3912 MKS ASTEX RPS PLASMA GENERATOR, P/N: AX7670 ASTRONI
C3912 MKS ASTEX RPS PLASMA GENERATOR, P/N: AX7670 ASTRONI

$21000.00

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MKS AsTex Plasma Source Tube AX7610PSK-S /1000117048 (As-Is)
MKS AsTex Plasma Source Tube AX7610PSK-S /1000117048 (As-Is)

$4453.00

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ASTeX Applied Science & Technology AX3060-14 RF Match SmartMatch MKS Working
ASTeX Applied Science & Technology AX3060-14 RF Match SmartMatch MKS Working

$7504.94

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ASTeX Waveguide Transition WR284 to WR430 GL341CPR MKS Instruments - Working
ASTeX Waveguide Transition WR284 to WR430 GL341CPR MKS Instruments - Working

$395.00

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MKS ASTEX ASTRON POWER Parts Used SA86241 Rev.F SA86237 Rev.E PCB-I-E-1541=6FX1
MKS ASTEX ASTRON POWER Parts Used SA86241 Rev.F SA86237 Rev.E PCB-I-E-1541=6FX1

$499.90

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MKS ASTEX FI20160-1 FREE EXPEDITED SHIPPING
MKS ASTEX FI20160-1 FREE EXPEDITED SHIPPING

$4970.00

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MKS ASTEX Rev. A P/N AX7657-7
MKS ASTEX Rev. A P/N AX7657-7

$14499.00

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ASTeX Applied Science & Technology GL341CPR Microwave RF Waveguide MKS Working
ASTeX Applied Science & Technology GL341CPR Microwave RF Waveguide MKS Working

$800.00

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MKS Instruments SA86743 Ozone Monitor Module System ASTeX Working Surplus
MKS Instruments SA86743 Ozone Monitor Module System ASTeX Working Surplus

$2806.24

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MKS AX8407 AMAT 0190-17159 ASTEX O3 OZONE GENERATOR AX8407A
MKS AX8407 AMAT 0190-17159 ASTEX O3 OZONE GENERATOR AX8407A

$16999.00

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MKS Instruments 1053395 Ozone System Power Distribution AX8585 ASTeX Working
MKS Instruments 1053395 Ozone System Power Distribution AX8585 ASTeX Working

$3509.24

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AX8560-1020 MKS/ASTEX OZONE GENERATOR
AX8560-1020 MKS/ASTEX OZONE GENERATOR

$12999.00

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MKS REMOTE PLASMA SOURCE, P/N: AX7650 RPS
MKS REMOTE PLASMA SOURCE, P/N: AX7650 RPS

$13000.00

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ASTeX Applied Science & Technology FI20625 Microwave RF Waveguide MKS Working
ASTeX Applied Science & Technology FI20625 Microwave RF Waveguide MKS Working

$1008.23

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AX8400 COMPACT MKS Instruments AX8407-C1 Ozone Generator ASTeX Untested As-Is
AX8400 COMPACT MKS Instruments AX8407-C1 Ozone Generator ASTeX Untested As-Is

$8006.24

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MKS ASTeX R*evolution AX7690PSK-04 Rev : J / Free Expedited Shipping
MKS ASTeX R*evolution AX7690PSK-04 Rev : J / Free Expedited Shipping

$9999.00

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MKS ASTeX FI20162-1 3.0kW Mag Head
MKS ASTeX FI20162-1 3.0kW Mag Head

$6000.00

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MKS ASTeX 6.0kW MW Generator FI20110
MKS ASTeX 6.0kW MW Generator FI20110

$18000.00

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MKS DOWN PLASMA SOURCE AX7610 AP-S
MKS DOWN PLASMA SOURCE AX7610 AP-S

$3000.00

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MKS ASTex Ozone Delivery System AX8575-12 with MkS AX8407HC
MKS ASTex Ozone Delivery System AX8575-12 with MkS AX8407HC

$35460.00

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MKS ASTeX, AMAT AKT ASTRON e/ex FI80132, 0190-72071 Plasma Source Gas Generator
MKS ASTeX, AMAT AKT ASTRON e/ex FI80132, 0190-72071 Plasma Source Gas Generator

$6640.00

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MKS ASTeX R*evolution AX7690PSK-04 Rev : M / Free Expedited Shipping
MKS ASTeX R*evolution AX7690PSK-04 Rev : M / Free Expedited Shipping

$9999.00

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MKS ASTeX R*evolution AX7690PSK-04 Rev : K / Free Expedited Shipping
MKS ASTeX R*evolution AX7690PSK-04 Rev : K / Free Expedited Shipping

$9999.00

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MKS ASTEX R*EVOLUTION REMOTE PLASMA SOURCE AX7690LAM-23
MKS ASTEX R*EVOLUTION REMOTE PLASMA SOURCE AX7690LAM-23

$7859.00

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[Used] MKS, ASTEX / AX3076 / SMART MATCH
[Used] MKS, ASTEX / AX3076 / SMART MATCH

$4498.00

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MKS ASTEX REVOLUTION MKS P/N AX7690LAM-23 LAM P/N 685-045803R023
MKS ASTEX REVOLUTION MKS P/N AX7690LAM-23 LAM P/N 685-045803R023

$30000.00

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MKS ASTEX Parts USED SA86244 REV.A PCB-I-E-1352=6DX3
MKS ASTEX Parts USED SA86244 REV.A PCB-I-E-1352=6DX3

$399.90

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ASTEX Model No. AX3151. 3.0kW Circulator DUMMY LOAD
ASTEX Model No. AX3151. 3.0kW Circulator DUMMY LOAD

$11200.00

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Astex MKS Control Interface Ozone Generator Controller MX8300QTI AX8000
Astex MKS Control Interface Ozone Generator Controller MX8300QTI AX8000

$479.40

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A504952/1D MKS/ASTEX
A504952/1D MKS/ASTEX

$599.00

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AX8400 COMPACT MKS Instruments AX8407-C1 Ozone Generator ASTeX Working Surplus
AX8400 COMPACT MKS Instruments AX8407-C1 Ozone Generator ASTeX Working Surplus

$14406.74

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MKS Astex AX8407LS-D-SP Ozone Generator C1 LIQ Single 4 Cells, Compact, 452954
MKS Astex AX8407LS-D-SP Ozone Generator C1 LIQ Single 4 Cells, Compact, 452954

$12530.00

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MKS ASTEX AX8560 Ozone Generator (AX8560-2020)
MKS ASTEX AX8560 Ozone Generator (AX8560-2020)

$11699.99

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MKS ASTex LIQUOZON HeliO3 Gas Module, Dissolved Ozone Delivery System
MKS ASTex LIQUOZON HeliO3 Gas Module, Dissolved Ozone Delivery System

$45000.00

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MKS ASTeX ASTRON PARAGON F , AX7710MTS-03 RPS PLASMA GENERATOR
MKS ASTeX ASTRON PARAGON F , AX7710MTS-03 RPS PLASMA GENERATOR

$13888.00

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MKS ASTeX SMARTPOWER FI20160-1 3.0kW GENERATOR
MKS ASTeX SMARTPOWER FI20160-1 3.0kW GENERATOR

$7999.00

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MKS Astex Astron 2L w/one missing CPU Board FI20620-1 AMAT 0920-00013
MKS Astex Astron 2L w/one missing CPU Board FI20620-1 AMAT 0920-00013

$10000.00

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ASTeX MKS 34-0151-00 34-0351-SP-01 EMO Card A6 LIQ Smart
ASTeX MKS 34-0151-00 34-0351-SP-01 EMO Card A6 LIQ Smart

$180.00

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2626 ASTEX MKS ASTRON 2L, AMAT 0920-00013 FI20620-1
2626 ASTEX MKS ASTRON 2L, AMAT 0920-00013 FI20620-1

$16244.00

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MKS REMOTE PLASMA SOURCE, MKS P/N: FI20620-1-C / ASTRON2L / AMAT 0920-00013
MKS REMOTE PLASMA SOURCE, MKS P/N: FI20620-1-C / ASTRON2L / AMAT 0920-00013

$12000.00

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MKS ASTEX ASTRON2L Rev. C P/N AX7657-7
MKS ASTEX ASTRON2L Rev. C P/N AX7657-7

$15499.00

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MKS ASTeX GmbH, Berlin, Gasmodule 2-cell PrimO3, PN: 24-1057-00
MKS ASTeX GmbH, Berlin, Gasmodule 2-cell PrimO3, PN: 24-1057-00

$9300.00

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MKS ASTeX AX3130 Rev B
MKS ASTeX AX3130 Rev B

$1499.90

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MKS Instruments AX8560-3020 Astex Ozone Generator
MKS Instruments AX8560-3020 Astex Ozone Generator

$6500.00

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MKS ASTeX D13449 MAGNETRON HEAD 6.7kV, 3kW AG9131A
MKS ASTeX D13449 MAGNETRON HEAD 6.7kV, 3kW AG9131A

$549.00

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PC80107 SA86144 MKS ASTEX
PC80107 SA86144 MKS ASTEX

$1199.00

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MKS AsTex Plasma Source Tube AX7610PSK-S / 1000125345 (As-Is)
MKS AsTex Plasma Source Tube AX7610PSK-S / 1000125345 (As-Is)

$4638.00

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MKS AsTex Plasma Source Tube AX7610PSK-S / 1000124926 (As-Is)
MKS AsTex Plasma Source Tube AX7610PSK-S / 1000124926 (As-Is)

$4638.00

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MKS ASTeX Products Astron Paragon AX7700-01 Remote Plasma Source Generator
MKS ASTeX Products Astron Paragon AX7700-01 Remote Plasma Source Generator

$3990.00

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MKS ASTeX 6.0kW MW Generator FI20110 Rev 3.5 SMARTPower
MKS ASTeX 6.0kW MW Generator FI20110 Rev 3.5 SMARTPower

$14598.00

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MKS ASTeX AKT AMAT ASTRON HF+ AX7636-04 Reactive Gas Generator & Plasma Source
MKS ASTeX AKT AMAT ASTRON HF+ AX7636-04 Reactive Gas Generator & Plasma Source

$12500.00

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MKS ASTEX R*EVOLUTION REMOTE PLASMA SOURCE AX7690LAM-23
MKS ASTEX R*EVOLUTION REMOTE PLASMA SOURCE AX7690LAM-23

$10000.00

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MKS Revolution III AX7695LAM-10 Remote Plasma Source for On-Wafer Processing
MKS Revolution III AX7695LAM-10 Remote Plasma Source for On-Wafer Processing

$32929.00

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MKS ASTex MicroWave SmartPower 3kw FI20160-1 (As-Is)
MKS ASTex MicroWave SmartPower 3kw FI20160-1 (As-Is)

$9100.00

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MKS AsTex Plasma Source Tube AX7610PSK-Q (As-Is)
MKS AsTex Plasma Source Tube AX7610PSK-Q (As-Is)

$5459.92

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MKS ASTex AX8500 OZONE DELIVERY SYSTEM AX8550-14312-10BV1
MKS ASTex AX8500 OZONE DELIVERY SYSTEM AX8550-14312-10BV1

$25000.00

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32981 MKS ASTEX RPS PLASMA GENERATOR, P/N: AX7670-01, AMAT 0920-00047 ASTRONI
32981 MKS ASTEX RPS PLASMA GENERATOR, P/N: AX7670-01, AMAT 0920-00047 ASTRONI

$18000.00

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SXRH-R MKS/ASTEX
SXRH-R MKS/ASTEX

$2900.00

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MKS ASTeX ASTRONi Rev. C P/N AX7670 ASTRONi Remote Plasma Generator
MKS ASTeX ASTRONi Rev. C P/N AX7670 ASTRONi Remote Plasma Generator

$12693.06

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🏆 MKS LIQUOZON XF L13 (ASTEX)
🏆 MKS LIQUOZON XF L13 (ASTEX)

$30000.00

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MKS ASTEX ASTRON2L Rev. B P/N AX7657-13-C
MKS ASTEX ASTRON2L Rev. B P/N AX7657-13-C

$17999.00

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MKS ASTEX ASTRON2L Rev. B P/N AX7657 (2)-13-C
MKS ASTEX ASTRON2L Rev. B P/N AX7657 (2)-13-C

$16999.00

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MKS ASTEX ASTRON2L Rev:C P/N - AX7657-13 PLASMA SOURCE
MKS ASTEX ASTRON2L Rev:C P/N - AX7657-13 PLASMA SOURCE

$12419.08

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ASTEX MKS RPS 20L ASTRON HF+ , sold as is, no return
ASTEX MKS RPS 20L ASTRON HF+ , sold as is, no return

$15000.00

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ASTEX MKS ARX-X491 MICROWAVE CONTROL MODULE AMAT 0190-00398, 200/208VAC, (DL66)
ASTEX MKS ARX-X491 MICROWAVE CONTROL MODULE AMAT 0190-00398, 200/208VAC, (DL66)

$1050.00

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ASTEX MKS ARX-X491 MICROWAVE CONTROL MODULE AMAT 0190-00398, 200/208VAC, (DL67)
ASTEX MKS ARX-X491 MICROWAVE CONTROL MODULE AMAT 0190-00398, 200/208VAC, (DL67)

$1050.00

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