Manufacturing Techniques for Microfabrication and Nanotechnology by Marc J. Mado

Description: Manufacturing Techniques for Microfabrication and Nanotechnology by Marc J. Madou Focuses on various trends in industrial lithography and pattern transfer. This book covers photo lithography and next generation lithographies and presents a number of subtractive etching techniques, including dry, chemical, and electrochemical wet. It explains thermal, electro thermal, and mechanical removing techniques. FORMAT Hardcover LANGUAGE English CONDITION Brand New Publisher Description Designed for science and engineering students, Manufacturing Techniques for Microfabrication and Nanotechnology focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies, detailing those that differ the most from the miniaturization processes used to fashion ICs. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Readers should use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine. Author Biography University of California, Irvine, USA Table of Contents Lithography: Photolithography. Next-Generation Lithographies and Lithography Research. Pattern Transfer With Subtractive Techniques: Dry Etching. Wet Chemical Etching and Wet Bulk Micromachining—Pools as Tools. Thermal Energy-Based Removing. Mechanical Energy-Based Removing. Pattern Transfer With Additive Techniques: Physical and Chemical Vapor Deposition—Thin Film Properties and Surface Micromachining. Chemical, Photochemical and Electrochemical Forming Techniques. Thermal Energy-Based Forming Techniques—Thermoforming. Micro-Molding Techniques—LIGA. Details ISBN1420055194 Author Marc J. Madou Short Title MANUFACTURING TECHNIQUES FOR M Language English ISBN-10 1420055194 ISBN-13 9781420055191 Media Book Format Hardcover DEWEY 620.5 Imprint CRC Press Inc Country of Publication United States Edition 1st Place of Publication Bosa Roca Pages 670 Affiliation University of California, Irvine, USA DOI 10.1604/9781420055191 AU Release Date 2011-06-13 NZ Release Date 2011-06-13 US Release Date 2011-06-13 UK Release Date 2011-06-13 Illustrations 112 Tables, black and white; 625 Illustrations, color Publisher Taylor & Francis Inc Year 2011 Publication Date 2011-06-13 Audience Tertiary & Higher Education We've got this At The Nile, if you're looking for it, we've got it. With fast shipping, low prices, friendly service and well over a million items - you're bound to find what you want, at a price you'll love! TheNile_Item_ID:139814106;

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